Patent Number: 6,165,587

Title: Microbridge structure with reinforcement section

Abstract: A microbridge structure includes a thin film section provided to be spaced from a substrate, and a supporting section formed around the thin film section and also spaced from the substrate, for supporting the thin film section. The supporting section is reinforced by a first reinforcement section, and the thin film section is reinforced by a second reinforcement section.

Inventors: Nonaka; Ken-Ichi (Saitama, JP)

Assignee: Honda Giken Kogyo Kabushiki Kaisha

International Classification: H01L 27/16 (20060101); B32B 007/00 (); B32B 003/00 (); G01J 005/00 (); H01L 029/06 (); H01L 021/76 ()

Expiration Date: 12/26/2017