Patent Number: 6,165,650

Title: Reticle cleaning without damaging pellicle

Abstract: A reticle having a pellicle frame and pellicle membrane is cleaned without removing or damaging the pellicle membrane. A cover encases the pellicle membrane and pellicle frame, sealing the pellicle from the external environment during a cleaning process. The cover fits around the periphery of the pellicle frame and covers the pellicle membrane. An edge of the cover in contact with the reticle forms a seal. The reticle is fastened to reticle supports on a spin chuck during the cleaning process. An anchor plate presses the cover to the reticle, maintaining the pellicle sealed from the external environment. The cover and reticle are sandwiched together between the anchor plate and spin chuck.

Inventors: Williams; Matthew E. (Meridian, ID)

Assignee: Micron Technology, Inc.

International Classification: G03F 1/14 (20060101); G03F 1/00 (20060101); G03F 009/00 (); A47G 001/12 (); B44F 001/12 (); B65D 085/38 ()

Expiration Date: 12/26/2017