Patent Number: 6,165,697

Title: Antihalation compositions

Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.

Inventors: Thackeray; James W. (Braintree, MA), Orsula; George W. (Avon, MA)

Assignee: Shipley Company, L.L.C.

International Classification: G03F 7/38 (20060101); G03F 7/038 (20060101); G03F 7/09 (20060101); G03C 005/00 ()

Expiration Date: 12/26/2017