Patent Number: 6,166,380

Title: Resolving power evaluation method and specimen for electron microscope

Abstract: An electron microscope resolving power evaluation method for evaluating performance of a scanning electron microscope without resorting to visual sensory analysis for minimizing a difference in deterioration with age and in performance among individual scanning electron microscopes. A specimen is prepared by overlaying materials having different emission coefficients of secondary charged particles such as secondary electrons, backscattered electrons, transmitted electrons, etc., a cross-section including an overlaid material part of thin-film layers having known dimensions is mirror-finished, data of a scanning electron microscopical image of the cross-section, including the overlaid material part is obtained, and then the resolving power performance of the scanning electron microscope is evaluated quantitatively by means of frequency analysis, etc.

Inventors: Kitagawa; Taiji (Fujisawa, JP), Sato; Mitsugu (Hitachinaka, JP), Shimoma; Goroku (Minori-machi, JP), Takahashi; Tadanori (Hitachinaka, JP), Yoshida; Naoto (Hitachinaka, JP), Yukii; Masayuki (Hitachinaka, JP), Ninomiya; Takanori (Hiratsuka, JP), Horiuchi; Tatsuo (Chigasaki, JP), Kawame; Keisuke (Yokohama, JP)

Assignee: Hitachi, Ltd.

International Classification: H01J 37/28 (20060101); G01N 001/28 (); H01J 037/26 ()

Expiration Date: 12/26/2017