Patent Number: 6,166,401

Title: Flash memory with microcrystalline silicon carbide film floating gate

Abstract: A memory is described which has memory cells that store data using hot electron injection. The data is erased through electron tunneling. The memory cells are described as floating gate transistors wherein the floating gate is fabricated using a conductive layer of microcrystalline silicon carbide particles. The microcrystalline silicon carbide particles are in contact such that a charge stored on the floating gate is shared between the particles. The floating gate has a reduced electron affinity to allow for data erase operations using lower voltages.

Inventors: Forbes; Leonard (Corvallis, OR)

Assignee: Micron Technology, Inc.

International Classification: H01L 29/49 (20060101); H01L 29/66 (20060101); H01L 29/423 (20060101); H01L 29/40 (20060101); H01L 29/788 (20060101); H01L 029/72 ()

Expiration Date: 12/26/2017