Patent Number: 6,166,421

Title: Polysilicon fuse that provides an open current path when programmed without exposing the fuse to the environment

Abstract: The contamination introduced into a conventional fuse via the window opening of the fuse is eliminated by forming a fuse with a cavity. When the fuse is programmed by passing a current through the fuse which is sufficient to heat up the fuse material, the heated fuse material flows up into the cavity, thereby providing an open current path.

Inventors: Kalnitsky; Alexander (San Francisco, CA), Bergemont; Albert (Palo Alto, CA)

Assignee: National Semiconductor Corporation

International Classification: H01L 23/525 (20060101); H01L 23/52 (20060101); H01L 029/00 ()

Expiration Date: 12/26/2017