Patent Number: 6,166,422

Title: Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor

Abstract: An integrated circuit structure is provided with an inductor formed therein which comprises a metal coil on an insulated surface over a semiconductor substrate, and a high magnetic susceptibility cobalt/nickel metal core located adjacent said metal coil, but spaced therefrom by one or more insulation layers. In one embodiment, the high magnetic susceptibility cobalt/nickel metal core is placed between lower and upper portions of the metal coil which are interconnected together by filled vias. In another embodiment, the metal coil is formed in a serpentine shape in one plane on an insulated surface over the semiconductor substrate, and the high magnetic susceptibility cobalt/nickel metal core is formed over the serpentine coil, but spaced from the serpentine coil by another insulation layer.

Inventors: Qian; Linggian (San Jose, CA), Yeh; Wen-Chin Stanley (Fremont, CA)

Assignee: LSI Logic Corporation

International Classification: H01F 17/00 (20060101); H01F 41/04 (20060101); H01L 23/522 (20060101); H01L 23/52 (20060101); H01L 029/00 ()

Expiration Date: 12/26/2017