Patent Number: 6,166,505

Title: Interlocking apparatus

Abstract: An interlocking apparatus includes a plurality of determination units independent of each other, an operation stopping circuit, a switch, and a restoring circuit. The plurality of determination units determine that a semiconductor device manufacturing equipment has shifted to a predetermined state. The operation stopping circuit sets the manufacturing equipment to an operation stop state when at least one of the plurality of determination units determines that the manufacturing equipment has shifted to the predetermined state. The switch inputs a restoration instruction instructing that the manufacturing equipment set in the operation stop state is restored to an operation state. The restoring circuit is responsive to the restoration instruction to restore the manufacturing equipment to the operation state only when the manufacturing equipment is set in the operation stop state determined by all of the plurality of determination units determining that the manufacturing equipment has shifted to the predetermined state.

Inventors: Sato; Mitsuya (Yokohama, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: F16P 3/00 (20060101); B25J 9/16 (20060101); F16P 3/08 (20060101); H01L 021/68 (); H02H 007/08 (); G02F 019/00 ()

Expiration Date: 12/26/2013