Patent Number: 6,166,553

Title: Prober-tester electrical interface for semiconductor test

Abstract: An apparatus for providing an electrical connection between a load board and a probe card assembly is described. The load board has a plurality of first contacts and is for interfacing with a test head. The probe card assembly has a plurality of second contacts and is for interfacing with a device-under-test (DUT). A load board assembly is provided for incorporating the load board. The load board assembly has a plurality of guide pins and either a plurality of cam members or a plurality of cam grooves. An electrical interface is provided having a plurality of conductive elements for establishing electrical contact between the first contacts and the second contacts. The electrical interface also has a plurality of apertures for receiving the guide pins thereby aligning the conductive elements with the first contacts. A cap ring is provided having the other of the plurality of cam members and the plurality of cam grooves. The probe card assembly has a plurality of apertures for receiving the guide pins thereby aligning the second contacts with the conductive elements. Rotation of the cap ring relative to the load board assembly engages the cam members in the cam grooves thereby compressing the electrical interface between the load board and the probe card assembly and establishing the electrical connection.

Inventors: Sinsheimer; Roger (Petaluma, CA)

Assignee: Xandex, Inc.

International Classification: G01R 31/28 (20060101); G01R 031/02 ()

Expiration Date: 12/26/2017