Patent Number: 6,166,897

Title: Static chuck apparatus and its manufacture

Abstract: The static chuck apparatus includes a metal substrate, a first adhesive layer provided on the metal substrate, a ceramic insulating plate provided on the first adhesive layer, a second adhesive layer provided on the ceramic insulating plate, an insulating film provided on the second adhesive layer, and an electrode provided between the second adhesive layer and the insulating film.

Inventors: Matsunaga; Tadao (Shimizu, JP)

Assignee: Tomoegawa Paper Co., Ltd.

International Classification: H02N 13/00 (20060101); H01L 21/683 (20060101); H01L 21/67 (20060101); H02N 013/00 ()

Expiration Date: 12/26/2013