Patent Number: 6,167,065

Title: Compact discharge pumped soft x-ray laser

Abstract: An extremely compact soft x-ray and/or extreme ultraviolet laser is disclosed that can be repetitively fired within short time intervals. The laser generates a plasma within a capillary (3) by flowing through the capillary (3) a fast high current pulse generated by a very compact liquid dielectric (1) transmission line (9) geometry.

Inventors: Rocca; Jorge (Fort Collins, CO)

Assignee: Colorado State University Research Foundation

International Classification: H01S 4/00 (20060101); H01S 003/30 ()

Expiration Date: 12/26/2017