Patent Number: 6,167,194

Title: Guard ring of a heating device of the light irradiation type

Abstract: A guard ring of a heating device of the light irradiation type in which temperature can be easily controlled, matching to the temperature change of the substrate is good, the temperature change of the substrate can be made uniform, and in which processing is also simple. The object is achieved by the having: a circular area which is opposite the substrate circumferential surface and which has essentially the same height as the substrate thickness; an annular main part which is connected to the outside of the circular area which is opposite the circumferential surface of the substrate, and which has essentially the same thickness as the substrate, and with a heat capacity per unit of area which is essentially equal to the heat capacity of the substrate; and an annular substrate bearing part with a surface which runs from the lower end of the area which is opposite the circumferential surface of the substrate in the direction to the middle, has a tapered shape.

Inventors: Moto; Atsushi (Yokohama, JP), Suzuki; Shinji (Kawaski, JP)

Assignee: Ushiodenki Kabushiki Kaisha

International Classification: H01L 21/00 (20060101); F26B 003/30 ()

Expiration Date: 12/26/2017