Patent Number: 6,167,602

Title: Lamp removal tool

Abstract: The present invention provides a novel lamp removal tool which can be used to advantageously remove a hot lamp from a lamp module that has limited access space by not requiring the cool-down of the system such that a burned-out lamp can be quickly removed and replaced causing minimal impact on the fabrication process.

Inventors: Yang; Chao Sheng (Keelung, TW), Yang; Jing Long (Hsin-Chu, TW)

Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.

International Classification: B25B 27/02 (20060101); B25B 9/00 (20060101); B25B 9/02 (20060101); F21V 19/04 (20060101); H01R 43/26 (20060101); H01R 33/09 (20060101); H01R 33/05 (20060101); B25B 027/14 ()

Expiration Date: 01/02/2018