Patent Number: 6,167,753

Title: Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope

Abstract: A scanning probe microscope operates in the manner of an atomic force microscope during intermittent periods of scanning motion, in which a sample surface is driven so that a scan line on the surface is moved past a probe tip being vibrated in engagement with the surface. Between these intermittent periods of scanning motion, the vibrating probe tip is moved out of engagement with the sample surface, so that the amplitude and phase shift of probe tip vibrations are determined by the gradient of a force field extending outward from the sample surface. Such a force field is established when the probe tip is attracted by, or repelled from, a magnetic or electric field at or near the sample surface. For each sample point, the system stores data representing the height of the sample surface and the force field.

Inventors: Chen; Dong (Boca Raton, FL), Flecha; Edwin (Boca Raton, FL), Hammond; James Michael (Boca Raton, FL), Roessler; Kenneth Gilbert (Boca Raton, FL)

Assignee: International Business Machines Corporation

International Classification: G01R 29/08 (20060101); G01R 31/303 (20060101); G01R 31/28 (20060101); G01B 007/34 ()

Expiration Date: 01/02/2018