Patent Number: 6,168,002

Title: Control system for use with semiconductor device transporting and handling apparatus

Abstract: In a handler attracting and transporting ICs by the use of a vacuum pick-up head, a control system is provided which provides for removing a jammed IC without the need for opening the door of the constant temperature chamber, if the vacuum pick-up head's failure to grasp an IC should cause jamming. A jam detecting means detects the occurrence of jam to interrupt the operation of the handler, whereupon a motion control means is activated to move the vacuum pick-up head to and stop it at a position distant from the site of jamming whereby the space above the site of jamming is cleared. This allows for removing the jammed IC by using a manipulator rod inserted through a through-hole formed through the outer wall of the constant temperature chamber.

Inventors: Takahashi; Hiroyuki (Gyoda, JP), Ogawa; Masaaki (Gyoda, JP)

Assignee: Advantest Corporation

International Classification: H05K 13/08 (20060101); H05K 13/02 (20060101); H05K 13/00 (20060101); B65G 043/00 ()

Expiration Date: 01/02/2018