Patent Number: 6,168,310

Title: Device for measuring physical quantity using pulsed laser interferometry

Abstract: Pulsed laser beams are applied to an object to be measured. A first laser beam of a pulsed laser beam having a first wavelength which is oscillated immediately after the rise of the pulsed laser beam, and a second laser beam having a second wavelength which is oscillated thereafter are used. Based on a difference between an intensity of first interfered light of reflected light of the first laser beam or transmitted light thereof, and an intensity of reflected light of the second laser beam or transmitted light thereof, temperatures of the object to be measured, and whether the temperatures are on increase or on decrease are judged. The method and device can be realized by simple structures and can measure a direction of changes of the physical quantities.

Inventors: Kurosaki; Ryo (Kawasaki, JP), Kikuchi; Jun (Kawasaki, JP), Serizawa; Haruhiko (Kawasaki, JP), Fujimura; Shuzo (Kawasaki, JP)

Assignee: Fujitsu Limited

International Classification: G01K 11/00 (20060101); H01L 21/66 (20060101); G01K 011/00 (); G01B 009/02 ()

Expiration Date: 01/02/2018