Patent Number: 6,168,364

Title: Vacuum clean box, clean transfer method and apparatus therefor

Abstract: A vacuum clean box 30 includes a box body 31 having a side aperture 32 and a small hole 33 for intake/exhaust, a side lid 34 for closing the side aperture 32 by a pressure difference between inside and outside thereof, and an additional lid 35 for similarly closing the small hole 33 for intake/exhaust. The vacuum clean box 30 is connected to a gate aperture 42 of a clean room 40 and a vacuum changer 50 evacuates a hermetically closed space outside the box body including the additional lid 35 to cancel the pressure difference between inside and outside of the additional lid 35 and then opens the small hole 33 for intake/exhaust. After the inside of the vacuum clean box 30 is turned into the atmospheric pressure through the small hole 33 for intake/exhaust, the side lid 34 is drawn into the clean room 40 to make communication between the inside space of the vacuum clean box and the inside of the clean room 40, and then objects to be transferred are transferred between the vacuum clean box and the clean room.

Inventors: Miyajima; Toshihiko (Tokyo, JP)

Assignee: TDK Corporation

International Classification: H01L 21/67 (20060101); H01L 21/677 (20060101); B65G 049/07 ()

Expiration Date: 01/02/2018