Patent Number: 6,168,395

Title: Bistable microactuator with coupled membranes

Abstract: A bistable electrostatic actuator with pneumatic or liquid coupling. The actuator has enclosed metallic electrodes. It can be used for a microvalve or micropump. The actuator has buckled membrane sections in pairs and curved substrate electrodes, locally associated with said membrane sections.

Inventors: Quenzer; Hans Joachim (Itzehoe, DE), Wagner; Bernd (Looft, DE)

Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.

International Classification: F04B 43/02 (20060101); F04B 43/04 (20060101); F15C 5/00 (20060101); H01H 59/00 (20060101); H02N 1/00 (20060101); F04B 017/00 (); F16K 031/02 ()

Expiration Date: 01/02/2018