Patent Number: 6,168,427

Title: Apparatus for guiding the removal of a processing tube from a semiconductor furnace

Abstract: A processing chamber tube used in a semiconductor furnace is guided during its removal from the furnace by a plurality of circumferentially spaced guides. The guides are mounted for adjustable radial movement on a ring-shaped plate. The plate is secured on the base of the furnace. The guides are preferably in the form of rollers which engage and guide the tube during its removal from the furnace.

Inventors: Cho; Guey-Shyung (Hsin-Chu, TW), Chen; Yi-Jen (Hsinshih Tainan, TW)

Assignee: Taiwan Semiconductor Manufacturing Co., Ltd

International Classification: C30B 35/00 (20060101); H01L 21/67 (20060101); H01L 21/687 (20060101); F27D 003/12 ()

Expiration Date: 01/02/2018