Patent Number: 6,168,504

Title: Polishing chucks, semiconductor wafer polishing chucks, abrading methods, polishing methods, semiconductor wafer polishing methods, and methods of forming polishing chucks

Abstract: Polishing chucks, semiconductor wafer polishing chucks, abrading methods, polishing methods, semiconductor wafer polishing methods, and methods of forming polishing chucks are described. In one embodiment, a polishing chuck includes a body dimensioned to hold a work piece, and a multi-positionable, force-bearing engagement surface is positioned on the body to engage at least a portion of a work piece held thereby. The surface has an undeflected position, and is bi-directionally deflectable away from the undeflected position. In another embodiment, a yieldable engagement surface is provided on the body and has a central area and a peripheral area outward of the central area. One of the central and peripheral areas is movable, relative to the other of the areas to provide both inwardly and outwardly flexed surface configurations. In yet another embodiment, a generally planar surface is provided on the body and positioned to receive the work piece thereagainst. The surface is movable into a non-planar, force-varying configuration in which more force is exerted on outermost portions of a work piece during polishing than on innermost portions of a work piece. A deflector is operably connected with the surface and configured to move the surface into the non-planar configuration. In a preferred embodiment, a force-varying deflector on the body is configured and operable to move the body surface into both concave and convex force-varying configurations.

Inventors: Gotcher, Jr.; Leland F. (Boise, ID)

Assignee: Micron Technology, Inc.

International Classification: B24B 41/06 (20060101); B24B 37/04 (20060101); H01L 21/67 (20060101); H01L 21/687 (20060101); B24B 007/22 ()

Expiration Date: 01/02/2018