Patent Number: 6,168,506

Title: Apparatus for polishing using improved plate supports

Abstract: A set of supports are advantageously disposed on a top plate having a polishing surface useful for polishing workpieces, thereby applying substantially uniform pressure to the top plate. In a preferred embodiment, the supports are non-isosceles triangular elements distributed evenly at 45 degree increments around a ring-shaped top plate. This structure effectively compensates for radial stress variations arising from non-optimum positioning of support points with respect to the inner and outer diameters of the polishing surface.

Inventors: McJunken; Bob (Chandler, AZ)

Assignee: SpeedFam-IPEC Corporation

International Classification: B24B 37/04 (20060101); B24B 41/00 (20060101); B24B 41/04 (20060101); B24B 007/00 (); B24B 041/00 ()

Expiration Date: 01/02/2018