Patent Number: 6,168,638

Title: Touchless stabilizer for processing spherical shaped devices

Abstract: An apparatus for securing a device, such as a spherical shaped semiconductor integrated circuit, for fabrication. The apparatus includes a plenum having an input and several outputs. The input of the plenum is connected to a pressurized fluid source. The outputs are separated into two groups: a centralized output and several peripheral outputs. The outputs connects to apertures located on a top surface of the apparatus. The centralized apertures expel the pressurized fluid from the fluid source to suspend the spherical shaped semiconductor integrated circuit device above the top surface. The peripheral apertures expel the pressurized fluid from the fluid source to secure the device above the centralized apertures.

Inventors: Kasim; Ramesh K. (Garland, TX), Ramamurthi; Ram (Allen, TX)

Assignee: Ball Semicondutor, Inc.

International Classification: C30B 33/00 (20060101); C30B 35/00 (20060101); H01L 21/683 (20060101); H01L 21/67 (20060101); H01L 21/68 (20060101); H01L 021/00 (); H01L 021/64 (); C30B 028/08 (); B05C 011/00 (); B05C 013/00 ()

Expiration Date: 01/02/2018