Patent Number: 6,168,665

Title: Substrate processing apparatus

Abstract: A substrate processing apparatus comprising a substrate mounting table, a cup having an upper opening and surrounding the substrate mounting table, a lid for opening/closing the upper opening of the cup, a support arm for supporting the lid, a first lifting mechanism having a first piston for supporting the support arm directly or indirectly and a first cylinder for guiding the first piston in an up-and-down motion, a second lifting mechanism having a second piston for supporting the support arm directly or indirectly and a second cylinder for guiding the second piston in up-and -down motion, a driving circuit for supplying the pressurized fluid to the first and second cylinders, independently and exhausting the pressurized fluid from the first and second cylinders, independently, and a control mechanism for controlling operations of the driving circuit.

Inventors: Sakai; Mitsuhiro (Kumamoto-ken, JP), Tateyama; Kiyohisa (Kumamoto, JP), Motoda; Kimio (Kumamoto, JP)

Assignee: Tokyo Electron Limited

International Classification: H01L 21/00 (20060101); B05C 11/08 (20060101); B05C 021/00 (); B05C 011/00 ()

Expiration Date: 01/02/2018