Patent Number: 6,168,667

Title: Resist-processing apparatus

Abstract: A resist-processing apparatus comprising a plurality of first processing units, a second processing unit, a first transport unit, a second transport unit, and an interface section. The first processing units are designed to process a wafer, and the second processing unit to process the wafer. The first transport unit has a first arm mechanism for loading and unloading the wafer into and from each of the first processing units. The second transport unit opposes the first transport unit, with the first processing units located between the first transport unit and the second transport unit. The second transport unit has a second arm mechanism for loading and unloading the wafer into and from at least one of the first processing units and into and from the second processing unit. The interface section is to be provided adjacent to an exposure apparatus. The first arm mechanism transfers the wafer between the first transport unit and the exposure apparatus.

Inventors: Yoshioka; Kazutoshi (Kumamoto-ken, JP)

Assignee: Tokyo Electron Limited

International Classification: H01L 21/67 (20060101); H01L 21/00 (20060101); H01L 21/677 (20060101); C23C 016/00 (); B65G 049/07 ()

Expiration Date: 01/02/2018