Patent Number: 6,168,668

Title: Shadow ring and guide for supporting the shadow ring in a chamber

Abstract: The invention generally relates to a processing system and related methods that include a chamber, a pedestal disposed in the chamber, a shadow ring and a set of alignment and support tabs which receive and directly align a substrate with a shadow ring, substantially independently of the pedestal. In one aspect of the invention, a shadow ring is provided which includes an upper shielding portion and a lower alignment and support member. The alignment and support member preferably includes one or more alignment and support tabs. A set of lift pins are preferably disposed in the chamber that may align the substrate and shadow ring with the pedestal. At least one pedestal recess may be located in the pedestal to receive the alignment and support tabs when the pedestal is in a raised position and in some instances to align the substrate and shadow ring to the pedestal.

Inventors: Yudovsky; Joseph (Palo Alto, CA)

Assignee: Applied Materials, Inc.

International Classification: H01L 21/67 (20060101); H01L 21/687 (20060101); H01L 21/68 (20060101); C23C 016/00 ()

Expiration Date: 01/02/2018