Patent Number: 6,168,672

Title: Method and apparatus for automatically performing cleaning processes in a semiconductor wafer processing system

Abstract: A semiconductor wafer processing system with a multi-tasking sequencer control that performs an automatic cleaning process for the process chamber or chambers of the system.

Inventors: Nguyen; Thu Van (San Jose, CA)

Assignee: Applied Materials Inc.

International Classification: H01L 21/00 (20060101); B08B 007/04 (); B08B 003/00 (); B08B 003/04 (); B44C 001/22 ()

Expiration Date: 01/02/2018