Patent Number: 6,168,680

Title: Method of producing a zirconia diaphragm structure

Abstract: A zirconia diaphragm structure, and a method of producing such structure. The zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-3.0% by weight of alumina, 0.1-3.0% by weight of silica, 0.1-5.0% by weight of alumina and silica, 0.1-5.0% by weight of alumina and magnesia, or 0.1-5.0% by weight of alumina, silica and magnesia.

Inventors: Takeuchi; Yukihisa (Aichi-ken, JP), Masumori; Hideo (Anjo, JP), Takeuchi; Katsuyuki (Nagoya, JP), Nanataki; Tsutomu (Nagoya, JP)

Assignee: NGK Insulators, Ltd.

International Classification: C04B 35/486 (20060101); G01L 7/02 (20060101); G01L 7/08 (20060101); H01L 41/00 (20060101); H01L 41/053 (20060101); H01L 41/09 (20060101); B32B 031/26 ()

Expiration Date: 01/02/2018