Patent Number: 6,168,695

Title: Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same

Abstract: A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly onto a tool frame. The lift and rotating assembly further includes a rotating mechanism coupling a processing head to the body, and for rotating the process head with respect to the body. The rotating mechanism includes a motor, wherein the motor is located within the processing head and the shaft of the motor is coupled to and rotationally fixed with respect to the body. The lift and rotate assembly further includes a lift mechanism for lifting the process head with respect to the body. A cable assembly within the lift and rotate assembly provides at least one of signals, gases and fluids to the process head. The cable assembly includes a common cable loop for feeding additional length of cable along both the lift direction of movement by the lift mechanism and the rotational direction of movement by the rotating mechanism.

Inventors: Woodruff; Daniel J. (Kalispell, MT), Bleck; Martin C. (Eagle, ID)

Assignee:

International Classification: H01L 21/00 (20060101); C25D 7/12 (20060101); C25B 009/00 ()

Expiration Date: 01/02/2018