Patent Number: 6,168,697

Title: Holders suitable to hold articles during processing and article processing methods

Abstract: An article holder uses a gas flow, for example, a vortex, to hold the article in a desired position. The gas flow is substantially restricted to an article portion reserved for handling. The result of the processing is less sensitive to the condition (e.g. temperature) of that portion than to the condition of the rest of the article. Therefore, if the gas flow affects the condition (e.g., temperature) of the article portion contacting the gas flow, the processing result is improved.

Inventors: Siniaguine; Oleg (Santa Cruz, CA), Kaufman; Steven (Redwood City, CA)

Assignee: TruSi Technologies LLC

International Classification: H01L 21/683 (20060101); H01L 21/67 (20060101); C23C 014/34 (); C23C 016/00 ()

Expiration Date: 01/02/2018