Patent Number: 6,168,698

Title: Apparatus for coating a substrate

Abstract: Power supply lines (41, 42) connect poles of an alternating current power source (43) to respective cathodes (58, 59) in compartments (32, 39), included among a plurality of adjacent compartments (32-39'), which together form a vacuum chamber (31) and which are connected to each other by a passageway (60). The two compartments (32, 39) with the cathodes (58, 59) are separated from each other by intermediate compartments (32'-38'), at least some of which are equipped with additional sputter cathodes (61-66).

Inventors: Szczyrbowski; Joachim (Goldbach, DE), Teschner; Gotz (Hanau, DE), Zmelty; Anton (Hosbach, DE)

Assignee: Balzers und Leybold Deutschland Holding AG

International Classification: C23C 14/56 (20060101); H01J 37/32 (20060101); H01J 37/34 (20060101); C23C 014/34 ()

Expiration Date: 01/02/2018