Patent Number: 6,168,906

Title: Micromachined membrane with locally compliant and stiff regions and method of making same

Abstract: A method of making a micromachined membrane having both stiff and flexible regions includes depositing a photoresist on a substrate; exposing the photoresist to actinic radiation through a mask to define openings having a first width in the photoresist in the stiff region and openings having a second width greater than the first width in the flexible region; developing the exposed photoresist to create the openings; etching the openings through the developed photoresist to create grooves in the substrate; and coating the substrate including the grooves with a film of material having a thickness greater than one half the first width and less than half of the second width to form adjacent contacting rigid corrugations in the stiff region and spaced compliant corrugations in the flexible region. Also disclosed is a micromachined membrane with a first region having as plurality of spaced nonintersecting corrugations being flexible in the direction transverse to the corrugations and a second region having a plurality of adjacent contacting intersecting corrugations being stiff in the plane of the intersecting corrugations and the direction transverse to the plane.

Inventors: Bernstein; Jonathan J. (Medfield, MA), Cunningham; Brian Thomas (Stow, MA)

Assignee: The Charles Stark Draper Laboratory, Inc.

International Classification: B81B 3/00 (20060101); G03F 7/40 (20060101); G03F 7/00 (20060101); G03F 007/26 ()

Expiration Date: 01/02/2018