Patent Number: 6,169,935

Title: Control method of stocker entry task and stocker exit task in semiconductor wafer cassette transportation apparatus

Abstract: In a stocker entry task control method employed in a semiconductor wafer cassette transportation apparatus that has high transportation ability of a semiconductor wafer cassette, a host computer sends an interrogation to a stocker in which a semiconductor wafer cassette is to be stored whether there is an available storage site therein. The stocker ascertains the storage site if available. Then, the host computer sends a transportation task instruction to an inter-stocker transport device or an automatic carrier. Alternatively, an entry task instruction is sent to the stocker.

Inventors: Iwasaki; Junji (Hyogo, JP), Katsube; Junichi (Hyogo, JP), Itami; Yasushi (Hyogo, JP)

Assignee: Mitsubishi Denki Kabushiki Kaisha

International Classification: H01L 21/00 (20060101); H01L 21/67 (20060101); H01L 21/677 (20060101); G06F 007/00 ()

Expiration Date: 01/02/2018