Patent Number: 6,170,116

Title: Abrasive member and cleaning device for probe needle for probe card

Abstract: An abrasive member and a cleaning device for a probe needle of a probe card are obtained which are capable of simplifying an operation of cleaning a probe needle of a probe card and also eliminating the step of employing an organic solvent or the like in the probe needle cleaning operation to improve the operating environment. In the cleaning device for a probe needle of a probe card, an abrasive member for a probe needle includes first and second fiber materials formed of at least one selected from the group consisting of a metal fiber, a carbon fiber and a ceramic fiber. The first and second fiber materials extend in different directions and are fixed to each other at a region thereof. A surface of abrasive member is provided with a space having approximately the same width as the width of the tip of a probe needle.

Inventors: Mizuta; Masaharu (Hyogo, JP)

Assignee: Mitsubishi Denki Kabushiki Kaisha

International Classification: B08B 1/00 (20060101); B24D 11/00 (20060101); G01R 1/067 (20060101); G01R 3/00 (20060101); A47L 013/04 ()

Expiration Date: 01/09/2018