Patent Number: 6,183,612

Title: Sputtering cathode

Abstract: A sputtering cathode with a flat plate-shaped target (8) and a tub-shaped yoke (3) arranged behind the target (8), with center ridge (5) and with magnets (7,7') for generating an enclosed tunnel of arc-shaped curved field lines (15,15') in front of the target surface, as well as with three sheet metal cutouts (9,10,11) or groups of partial cutouts inserted into the plane between the target (8) and the end faces (12) of the tub rim of the yoke (3) facing the target (8), all the sheet metal cutouts (9,10,11) together form two gaps (a,b) extending roughly parallel to the end faces (12,13), wherein the magnets (7,7') are each incorporated or inserted into the yoke bottom and the side surfaces of the magnets (7,7') facing towards and away from the target (8) run flush with the yoke bottom.

Inventors: Adam; Rolf (Hanau, DE), Krempel-Hesse; Jorg (Eckartsborn, DE), Bahr; Martin (Haundorf-Grafensteinberg, DE)

Assignee: Leybold Systems GmbH

International Classification: C23C 14/35 (20060101); H01J 37/32 (20060101); H01J 37/34 (20060101); C23C 014/34 ()

Expiration Date: 02/06/2018