Patent Number: 6,250,869

Title: Three chamber load lock apparatus

Abstract: A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing platform for making integrated circuits on silicon wafers. Each load lock chamber preferably has a semi-cylindrical valve which remains sealed when the load lock chamber is open to atmospheric pressure. A wafer cassette holder positioned within each load lock chamber can be loaded and unloaded while the semi-cylindcical valves seal the vacuum chamber from atmospheric pressure. The semi-cylindrical valve pivots to an open position when the load lock chamber is under vacuum and the entire wafer cassette moves from the load lock chamber to the central chamber.

Inventors: Kroeker; Tony R. (Georgetown, TX)

Assignee: Applied Materials, Inc.

International Classification: C23C 14/56 (20060101); F16K 51/02 (20060101); H01L 21/67 (20060101); H01L 21/00 (20060101); H01L 21/677 (20060101); B65G 049/00 ()

Expiration Date: 06/26/2018