Patent Number: 6,250,933

Title: Contact structure and production method thereof

Abstract: A contact structure for achieving an electrical connection with a contact target is formed of a contact substrate and a plurality of contactors mounted on the contact substrate. The contactors are produced on a semiconductor substrate or other dielectric by a microfabrication technology. Each of the contactors has a contact bump to contact with the contact target. In one aspect, one of the base portions of the contactor is slidably formed on the surface of the contact substrate. A spring force is generated when the contactor is pressed against the contact target. Various types of contact structures and the associated production methods are also described.

Inventors: Khoury; Theodore A. (Chicago, IL), Frame; James W. (Chicago, IL)

Assignee: Advantest Corp.

International Classification: G01R 1/067 (20060101); G01R 1/073 (20060101); H01R 13/24 (20060101); H01R 13/22 (20060101); H05K 3/40 (20060101); H01R 012/00 (); H05K 001/00 ()

Expiration Date: 06/26/2018