Patent Number: 6,250,990

Title: CSP plate cutting apparatus

Abstract: An apparatus for cutting CSP plates into individual pellets to put them on carrier trays for transportation includes a jig rack for the storing of jigs for holding CSP plates. A taking-in and -out table takes a selected jig out from the jig rack to transport it to an area in which CSP plates are brought and laid. The apparatus also includes a cassette table on which a CSP plate cassette is put. The selected CSP plate is taken out from the cassette and is put on an associated jig, which is laid on the table. A first transport transports the CSP plate-and-jig combination from the taking-in and -out table to a working table. The CSP plate is cut with a cutting blade, while the CSP plate-and-jig combination is held on the working table. The CSP plate is cut into individual pellets. A second transport transports the jig holding the CSP plate from the working table to a washing table where the cut CSP plate-and-jig combination are washed. A third transport transports the washed cut CSP plate-and-jig combination from the washing table to a pellet picking-up table. Individual pellets are picked up from the pellet picking-up table and put in carrier trays, which are laid in a pellet transferring area. A fourth transport transports empty jigs from the pellet picking-up table to the jig taking-in and -out table.

Inventors: Yoshii; Masahiro (Tokyo, JP), Namioka; Shinichi (Tokyo, JP), Kamigaki; Masakado (Tokyo, JP)

Assignee: Disco Corporation

International Classification: B28D 5/00 (20060101); H01L 21/67 (20060101); H01L 21/00 (20060101); H01L 21/673 (20060101); B24B 049/00 ()

Expiration Date: 06/26/2018