Patent Number: 6,250,991

Title: Bearing substitute for wafer polishing arm

Abstract: An apparatus and method for polishing a workpiece including a polishing pad, and at least one polishing arm for holding a workpiece to be polished on the polishing pad. The polishing arm includes at least one plastic bearing. The plastic bearing prevents lock up of a vacuum chuck coupled to the polishing arm because it is impervious to slurry which often becomes lodged in conventional ball bearings.

Inventors: Afif; Samir A. (Alburtis, PA)

Assignee: Agere Systems Guardian Corp.

International Classification: B24B 41/06 (20060101); B24B 37/04 (20060101); B24B 001/00 ()

Expiration Date: 06/26/2018