Patent Number: 6,251,182

Title: Susceptor for float-zone apparatus

Abstract: The present invention is an improved susceptor for a float-zone apparatus for the float-zone processing of silicon elements. The susceptor is of a cylindrical design which allows the susceptor to be positioned around a free end of a silicon element to heat the free end of the silicon element to facilitate inductive coupling of the free end of the silicon element with an RF induction coil heater. In a preferred embodiment of the present invention, the susceptor is formed from tantalum.

Inventors: Luna; Joaquin Enrique (Saginaw, MI), Wheelock; Scott Allen (Freeland, MI)

Assignee: Hemlock Semiconductor Corporation

International Classification: C30B 13/00 (20060101); C30B 13/20 (20060101); C30B 013/16 ()

Expiration Date: 06/26/2018