Patent Number: 6,251,192

Title: Vacuum exhaust system

Abstract: A vacuum exhaust system can improve the operating efficiency of the vacuum exhaust system while reducing the system cost, to quickly attain a vacuum in the auxiliary chambers without increasing the size of the vacuum pumps. The vacuum exhaust system comprises a first pumping section and a second pumping section disposed downstream of and in series with the first pumping section. A main exhaust passage is provided to communicate a main chamber with a suction port of the first pumping section, and an auxiliary exhaust passage is provided to communicate an auxiliary chamber with a suction port of the second pumping section.

Inventors: Kawamura; Takeshi (Kawasaki, JP), Niimura; Yasuhiro (Ayase, JP)

Assignee: Ebara Corporation

International Classification: C23C 16/44 (20060101); C23C 16/54 (20060101); C23C 016/00 ()

Expiration Date: 06/26/2018