Patent Number: 6,251,215

Title: Carrier head with a multilayer retaining ring for chemical mechanical polishing

Abstract: A carrier head for a chemical mechanical polishing apparatus includes a retaining ring having a flexible lower portion and a rigid upper portion.

Inventors: Zuniga; Steven M. (Soquel, CA), Osterheld; Thomas H. (Mountain View, CA), Rosenberg; Lawrence M. (San Jose, CA)

Assignee: Applied Materials, Inc.

International Classification: B24B 41/06 (20060101); B24B 37/04 (20060101); B24B 005/00 (); B24B 029/00 ()

Expiration Date: 06/26/2018