Patent Number: 6,251,230

Title: Method and device for manufacturing a thin film and magnestic recording medium

Abstract: A method and a device for manufacturing a thin film by a vacuum deposition method, and a magnetic recording medium produced thereby are disclosed. A thin film of high quality is mass-produced while introducing reaction gas to a thin film forming section from a nozzle consisting of minute tubes, so that the flow of evaporated atoms is not disturbed by the reaction gas.

Inventors: Honda; Kazuyoshi (Osaka, JP), Maezawa; Yoshiharu (Shiga, JP), Odagiri; Masaru (Hyogo, JP), Okazaki; Sadayuki (Osaka, JP)

Assignee: Matsushita Electric Industrial Co., Ltd.

International Classification: C23C 14/56 (20060101); C23C 14/00 (20060101); G11B 5/64 (20060101); G11B 5/85 (20060101); G11D 005/66 ()

Expiration Date: 06/26/2018