Patent Number: 6,251,235

Title: Apparatus for forming an electrical contact with a semiconductor substrate

Abstract: The present invention is directed to an apparatus for plating a surface of a semiconductor workpiece (wafer, flat panel, magnetic films, etc.) using a liquid conductor that makes contact with the outer surface of the workpiece. The liquid conductor is stored in a reservoir and pump through an inlet channel to the liquid chamber. The liquid conductor is injected into a liquid chamber such that the liquid conductor makes contact with the outer surface of the workpiece. An inflatable tube is also provided to prevent the liquid conductor from reaching the back face of the workpiece. A plating solution can be applied to the front face of the workpiece where a retaining ring/seal further prevents the plating solution and the liquid conductor from making contact with each other. Further, the present invention can be used to dissolve/etch a metal layer from the periphery of the workpiece.

Inventors: Talieh; Homayoun (San Jose, CA), Basol; Bulent (Manhattan Beach, CA)

Assignee: Nutool, Inc.

International Classification: H01L 21/00 (20060101); C25D 017/00 ()

Expiration Date: 06/26/2018