Patent Number: 6,251,242

Title: Magnetron and target producing an extended plasma region in a sputter reactor

Abstract: A target and magnetron for a plasma sputter reactor. The target has an annular trough facing the wafer to be sputter coated. Various types of magnetic means positioned around the trough create a magnetic field supporting a plasma extending over a large volume of the trough. For example, the magnetic means may include magnets disposed on one side within a radially inner wall of the trough and on another side outside of a radially outer wall of the trough to create a magnetic field extending across the trough, to thereby support a high-density plasma extending from the top to the bottom of the trough. The large plasma volume increases the probability that the sputtered metal atoms will become ionized. The magnetic means may include a magnetic coil, may include additional magnets in back of the trough top wall to increase sputtering there, and may include confinement magnets near the bottom of the trough sidewalls. The magnets in back of the top wall may have an outer magnet surrounding an inner magnet of the opposite polarity. The high aspect ratio of the trough also reduces asymmetry in coating the sidewalls of a deep hole at the edge of the wafer.

Inventors: Fu; Jianming (San Jose, CA), Gopalraja; Praburam (Sunnyvale, CA)

Assignee: Applied Materials, Inc.

International Classification: C23C 14/35 (20060101); H01L 21/02 (20060101); H01J 37/32 (20060101); H01L 21/70 (20060101); H01L 21/285 (20060101); H01L 21/768 (20060101); H01J 37/34 (20060101); C23C 014/35 (); C23C 014/34 ()

Expiration Date: 06/26/2018