Patent Number: 6,251,251

Title: Anode design for semiconductor deposition

Abstract: An anode assembly including a perforated anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow through perforations in the anode holder and perforations in the anode. An anode isolator separates the anode and a cathode. The anode isolator includes at least one curvilinear surface.

Inventors: Uzoh; Cyprian E. (Hopewell Junction, NY), Andricacos; Panayotis C. (Croton-on-Hudson, NY), Dukovic; John Owen (Poughkeepsie, NY), Westerfield, Jr.; Robert P. (Montgomery, NY)

Assignee: International Business Machines Corporation

International Classification: C25D 17/12 (20060101); C25D 7/12 (20060101); C25D 17/10 (20060101); C25D 021/18 ()

Expiration Date: 06/26/2018