Patent Number: 6,251,298

Title: Method of manufacture of a planar swing grill electromagnetic ink jet printer

Abstract: A method of manufacturing an ink jet printhead, including providing a semiconductor wafer having an electrical circuitry layer and a buried epitaxial layer formed thereon. A nozzle chamber aperture is etched in the electrical circuitry layer. A nozzle chamber is etched in the semiconductor wafer. The nozzle chamber is filled with a first sacrificial layer. An inert material layer is deposited over the nozzle chamber aperture and is etched to define a core structure and vias for electrical interconnection of subsequent layers with the electrical circuitry layer. A first conductive material layer is deposited and is etched form a lower electrical coil portion interconnected with the electrical circuitry layer. Predetermined vias for interconnection of the first conductive material layer with subsequent layers is formed. A fixed magnetic pole, a pivot, interconnected shutters and lever arm, springs and spring posts are formed from a high saturation flux material layer. A siae portion of an electrical coil is formed with a second conductive material layer. The top portion of the electrical coil is formed with a third conductive material layer. The wafer is back etched to the epitaxial layer and a nozzle aperture is etched in the epitaxial layer.

Inventors: Silverbrook; Kia (Sydney, AU)

Assignee: Silverbrook Research Pty Ltd

International Classification: B41J 2/045 (20060101); B41J 11/70 (20060101); B41J 2/14 (20060101); B41J 15/04 (20060101); B42D 15/10 (20060101); B41J 2/16 (20060101); B41J 3/42 (20060101); B41J 11/00 (20060101); G06F 1/16 (20060101); G06K 1/12 (20060101); G07F 7/08 (20060101); G07F 7/12 (20060101); G06K 1/00 (20060101); G06K 19/073 (20060101); G06K 19/06 (20060101); G06K 7/14 (20060101); G11C 11/56 (20060101); H04N 1/32 (20060101); H04N 5/262 (20060101); H04N 5/225 (20060101); H04N 1/21 (20060101); B41J 2/165 (20060101); B41J 2/175 (20060101); H04N 1/00 (20060101); B41J 002/16 ()

Expiration Date: 06/26/2018