Patent Number: 6,251,472

Title: Method of depositing electrode material onto a piezoelectric substrate whereby the substrate is masked and the unmasked portions are cleaned by a plasma or ion beam prior to deposition

Abstract: In a method for forming the electrode pattern of a piezoelectric element for an ultrasonic motor, metal pattern masks made of a metal material of a low expansion coefficient are disposed on the surfaces of piezoelectric elements for the ultrasonic motor, and the electrode patterns are formed on the surfaces of the piezoelectric elements through the metal pattern masks by means of a vacuum evaporation device which is equipped with a physical assistance device for rendering physical assistance with ion beams or ion plating.

Inventors: Ohashi; Kunimi (Tochigi-ken, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: C23C 14/04 (20060101); C23C 14/02 (20060101); H01L 41/22 (20060101); B05D 003/14 (); B05D 005/12 (); C23C 014/02 ()

Expiration Date: 06/26/2018