Patent Number: 6,251,544

Title: Exposure dose measuring method and exposure dose measuring mask

Abstract: In an exposure dose measuring method for measuring an effective exposure dose on a wafer by printing mask patterns formed on a mask onto a resist coated on the wafer by exposure, each of the mask patterns has light transmitting sections and light shielding sections repeated in a period p, a ratio of areas of the light transmitting sections to areas of the light shielding sections of each of the mask patterns differs from ratios of those of the others of the mask patterns, and the period p is set so as to satisfy a relationship of where an exposure light wavelength at the time of exposing the mask patterns is .lambda., a numerical aperture at a wafer side is NA, an illumination coherence factor is .sigma., and a mask pattern magnification for patterns to be formed on the wafer is M.

Inventors: Inoue; Soichi (Yokohama, JP), Ito; Shinichi (Yokohama, JP), Hayasaki; Kei (Yokohama, JP)

Assignee: Kabushiki Kaisha Toshiba

International Classification: G03F 1/14 (20060101); G03F 7/20 (20060101); G03F 009/00 ()

Expiration Date: 06/26/2018