Patent Number: 6,251,562

Title: Antireflective polymer and method of use

Abstract: An antireflective composition includes a polyphenolic polymer which has a first repeating unit and a second repeating unit of the formula: ##STR1## wherein each of R.sub.1, R.sub.2, R.sub.3, R.sub.4, and R.sub.5 is individually a hydroxy group, hydrogen or an azo dye and only one of R.sub.1, R.sub.2, R.sub.3, R4, and R.sub.5 is a hydroxy group.

Inventors: Breyta; Gregory (San Jose, CA), Clarke; Thomas Carl (Morgan Hill, CA), Dawson; Daniel Joseph (San Jose, CA), Esch; Ronald P. (San Jose, CA), Renaldo; Alfred Floyd (San Jose, CA)

Assignee: International Business Machines Corporation

International Classification: C08F 212/00 (20060101); C08F 212/14 (20060101); G03F 7/09 (20060101); G03C 001/825 (); G03C 001/73 ()

Expiration Date: 06/26/2018