Patent Number: 6,251,567

Title: Process for manufacturing microstructured bodies

Abstract: A method for manufacturing a microstructured body, comprises irradiating a material with a pattern of X-rays; and dissolving selectively irradiated or non-irradiated regions of the material, where the material comprises a light-hardening and/or UV-hardening epoxy coating. The epoxy coatings need shorter irrdiation times than known plastics. The resulting microstructures can have high aspect ratios, and the developed structures can be produced with greater structure depths, free of defects and faults. Structural precision is in the submicron range.

Inventors: Reinecke; Holger (Dortmund, DE), Kapitza; Norbert (Dortmund, DE), Ballhorn; Ralph-Ulrich (Dortmund, DE), Spitzner; Ulrike (Herne, DE), Schaefermeier; Bernhard (Bonn, DE)

Assignee: Microparts Gesellschaft

International Classification: G03F 7/20 (20060101); G03F 007/20 ()

Expiration Date: 06/26/2018